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OLED Organic-Inorganic Evaporation Coating System
編號:SN20151119170639271
類別:Evaporation Coating Equipment
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    設備用途  Application

    用于生長薄膜太陽能電池,EL OEL分子有機電致發光器件薄膜的研究工作。廣泛應用于大專院校、科研院所進行薄膜材料的科研與小批量制備。

    Used in growing thin-film solar cell, research of EL OEL molecular organic light emitting device film. Can be widely used in small volume production and on the scientific research on film materials by universities and research institutes.

    設備組成    Structure

    該系統采用直線式結構,主要由二個有機材料生長室組成,兩個有機材料生長室之間通過閘板閥聯接,其中一個生長室系統預留與手套箱對接接口,能夠完成二套獨立的制備薄膜系統之間互相傳送基片。有機材料生長室主要由真空室腔體組件、有機蒸發源、熱阻蒸發舟、樣品傳遞裝置、樣品臺、膜厚監測儀、真空室照明裝置、烘烤裝置等組成。

     

    The system is a linear structure, consists of two organic material growing chambers, and the chambers are connected by gate valve, one of the chamber has docking interface for glove box, can inter-transfer substrate between the two independent coating system. Organic material growing chamber is consisted of vacuum chamber unit, organic evaporation source, heat resistance evaporation boat, sample transfer device, sample table, film thickness monitor, vacuum chamber lighting device and baking device etc.

    型號 Model

    OPVD-450

    真空室

    Vacuum chamber

    二個D型真空室,尺寸均約為Φ450×H750;兩個真空室的真空系統配置、極限壓力、恢復真空時間、熱阻蒸發舟及電源、膜厚監測儀、真空室照明裝置、烘烤裝置、樣品臺的配置與技術參數指標相同。

    Two D shaped vacuum chamber, size: Φ450×H750chamber specifications are same as the main system

    真空系統配置

    Vacuum system feature

    日本進口低溫泵、無油渦旋干泵與電磁閥、復合數顯真空測量規與計、閥門等。

    Japanese cryopump, oil-free scroll dry pump and electromagnetic valve, compound digital-displayed vacuum measurement gauge and meter, valves etc.

    極限壓力

    Ultimate pressure

    2.0×10-5 Pa

    恢復真空時間

    Time required to reacquire vacuum

    40分鐘可達到1×10-4 Pa

    1×10-4 Pa in 40 mins

    電動磁力耦合樣品傳遞裝置

    Power-driven magnetic coupling sample delivering device

    真空室1

    Vacuum chamber 1

    采用磁力耦合line motion傳遞裝置,采用步進電機驅動,設有遠程手控控制盒,可控制直線前進后退。

    Use magnetic coupling line motion delivering device, driven by stepper motor, equipped with remote manual control box, to control linear forward/backward

    有機蒸發源及電源

    Organic evaporation source and power

    真空室1

    Vacuum chamber 1

    新型OEL升華型蒸發源9支,每支蒸料可裝10CC,室溫—800 7支,室溫—10002支;蒸發源電源4臺。

    9 New model OEL sublimation evaporation source, each filled with 10CC evaporation material, room temperature-800: 7, room temperature-1000; evaporation source power: 4

    真空室2

    Vacuum chamber 2

    新型OEL升華型蒸發源6支,每支蒸料可裝10CC,室溫—800 6支;蒸發源電源3臺。

    6 New model OEL sublimation evaporation source, each filled with 10CC evaporation material, room temperature-800: 6; evaporation source power: 3

    熱阻蒸發舟及電源

    Heat resistance evaporation boat and power

    新型蒸發舟:2組(熱阻蒸發舟);數字式熱阻蒸發電源:1臺,帶有細調功能(0.1安培);鍍鋁專用盒式蒸發舟:2個;普通金屬蒸發舟:10個;蒸發源擋板:2套。

    New model evaporation boat: 2 (heat resistance evaporation boat); digital heat resistance evaporation power: 1, with fine adjustment function (0.1A); aluminum coated special purpose box evaporation boat: 2; metal evaporation boat: 10; evaporation source baffle: 2.

    膜厚監測儀(Filtech SQM200

    Film thickness monitor Filtech SQM200

    厚度分辨率

    Thickness resolution ratio

    不平均:0.0133/測量;50個樣品平均:0.002/測量

    Non-uniformity: 0.0133Å/measure; 50 samples average: 0.002 Å/measure

    速率分辨率

    Velocity resolution ratio

    不平均:0.0133/秒;50個樣品平均:0.02/

    Non-uniformity: 0.0133Å/sec; 50 samples average: 0.02 Å/sec

    精度

    Precision

    0.03HZ/測量,2ppm

    0.03HZ/measure, 2ppm

    速度

    Speed

    每秒測量十次

    Measuring 10 times per second

    真空室照明裝置

    Vacuum chamber lighting device

    采用LED外照明方式,避免鍍膜污染照明燈

    LED lighting outside chamber, to prevent film coating contaminate lighting

    烘烤裝置

    Baking device

    在真空室外烘烤帶的烘烤方式

    Baking with hot wire outside vacuum chamber

    樣品臺

    Sample table

    樣品尺寸

    Substrate size

    可放置一塊100×100mm或者50×50mm基片

    Load one 100×100mm or 50×50mm substrate

    運動方式

    Mode of motion

    可電動上下升降,可旋轉,轉速為0-30/分,轉速可調

    Power driven lifting, rotatable, rotating speed 0-30rpm, rotating speed adjustable

     

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